Article ID Journal Published Year Pages File Type
10569269 Solid State Ionics 2011 5 Pages PDF
Abstract
► About effect of moisture on reduction in ionic conductivity of RF sputter deposited LiPON thin film. ► The reasons for reduction in ionic conductivity of LiPON thin films from 2.8×10-6 Scm-1 to 9.9×10-10 Scm-1 when exposed to air are analyzed. ► Exposure to humid ambience changes the surface morphology and elemental chemistry of LiPON.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Electrochemistry
Preview
Chemical and microstructural modifications in LiPON thin films exposed to atmospheric humidity
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