Scandium stabilized zirconium thin films formation by e-beam technique

It was determined that the deposition rate (in range from 2 to 16 Å/s) has influence on crystallite size. It increases by increasing the deposition rate from 18.4 to 26.9 nm. The XRD measurements show that the formed 10ScSZ thin films do not repeat the crystallographic phase of the initial evaporated powder material-it is changes from rhombohedra (initial powder) to cubic (the formed thin films).