Towards new precursors for ZnO thin films by single source CVD: the X-ray structures and precursor properties of zinc ketoacidoximates

A class of zinc α-ketoacidoximates have been prepared as precursors for the single source chemical vapour deposition of ZnO thin films. The X-ray structures of this class of compounds have been elucidated for the first time and show interesting structural variations relating to ligand substituents, which also influence the thermal stability and sublimation yield of these complexes.