| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10610530 | Carbon | 2005 | 5 Pages |
Abstract
The formation of spherical hydrogenated amorphous carbon (a-C:H) particulates generated in a radio frequency plasma enhanced chemical vapour deposition (rf-PECVD) system is reported. These particulates appear as a white powder-no other contaminants appear to be present. electron energy loss spectroscopy (EELS) shows characteristics typical of a-C:H with a reduced plasmon energy due to hydrogen incorporation. Raman spectroscopy however revealed a 1456Â cmâ1 line which was previously not reported on a-C:H films deposited using similar processes. Infrared (IR) spectroscopy shows that these spheres are mainly partially oxidised, methyl-rich, aliphatic hydrocarbons.
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Authors
G.Y. Chen, V. Stolojan, S.R.P. Silva, H. Herman, S. Haq,