Article ID Journal Published Year Pages File Type
10611383 Carbon 2005 5 Pages PDF
Abstract
Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy.
Related Topics
Physical Sciences and Engineering Energy Energy (General)
Authors
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