Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10611383 | Carbon | 2005 | 5 Pages |
Abstract
Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy.
Related Topics
Physical Sciences and Engineering
Energy
Energy (General)
Authors
A. Kromka, J. Breza, M. KadleÄıÌková, J. JanıÌk, F. Balon,