| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10620662 | Acta Materialia | 2010 | 8 Pages |
Abstract
By means of brief pauses in radiofrequency (RF) sputter deposition between individual layers, ultrathin copper oxide layers were formed through adsorption in the Cu/Cu multilayers. Their mechanical properties were compared with the Cu/Cu(O) multilayers whose oxide layers were deliberately deposited between copper layers. The mechanical hardness value of the Cu/Cu(O) multilayers approached that of nanostructured copper thin films. The Young's modulus of the multilayers was tunable, in accordance with the elasticity theories of composites. In addition, the Hall-Petch slope of the RF sputter-deposited Cu monolayers indicated that their theoretical strength approached the shear modulus of copper.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
J.P. Chu, Y.-C. Wang,