High energy density capacitors based on 0.88BaTiO3-0.12Bi(Mg0.5, Ti0.5)O3/PbZrO3 multilayered thin films

Multilayered thin films consisting of both 0.88BaTiO3-0.12Bi(Mg0.5,Ti0.5)O3 ferroelectric layers and PbZrO3 antiferroelectric layers were prepared by sol-gel method, exhibiting high dielectric permittivity, large polarization, high recoverable energy storage density and high energy storage efficiency. A maximum polarization of 93 μC/cm2, recoverable energy storage density of 24.7 J/cm3 and energy storage efficiency of ~60% have been achieved at an electric field of 1050 kV/cm. Furthermore, the energy storage performance of the multilayered thin films was improved by modified layer-by-layer annealing process, where larger polarization (115 μC/cm2), higher recoverable energy storage density (33 J/cm3) and higher energy storage efficiency (~70%) were obtained.