Article ID Journal Published Year Pages File Type
10626617 Ceramics International 2005 4 Pages PDF
Abstract
The microwave dielectric properties of CaTiO3 (CT), MgTiO3 (MT) and (Mg0.93Ca0.07)TiO3 (MCT) thin films prepared by the metalorganic solution deposition technique were investigated. The well-crystallized CT, MT and MCT thin films were annealed at 800 °C. The microwave dielectric properties of the thin films were measured using a circular-patch capacitor geometry with a network analyzer. The dielectric constant (K), dielectric loss (tan δ) and temperature coefficient of dielectric constant (TCK) of CT films measured up to 6 GHz were 160 ± 3, 0.003 ± 0.0003 and −1340 ppm/°C, respectively. In contrast, the MT films showed K ∼ 16 ± 1, tan δ ∼ 0.0008 ± 0.0001 and TCK ∼ +260 ppm/°C. MCT films exhibited microwave dielectric properties of K ∼ 22 ± 1, tan δ ∼ 0.0012 ± 0002 and TCK ∼ +10 ppm/°C.
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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