Article ID Journal Published Year Pages File Type
10631964 Materials Research Bulletin 2013 4 Pages PDF
Abstract

- Investigating the effect of ion-beam parameters on optical properties.
- Exploring the effect of ion-beam parameters on structural properties.
- Studying XRD patterns of Ta2O5 films deposited at different ion energies.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
Preview
Properties of Ta2O5 thin films prepared by ion-assisted deposition
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