Strength distribution of single-crystal silicon theta-like specimens

A new test specimen was developed for micro-scale tensile strength measurements, allowing direct assessment of surface effects on strength. Specimens were formed by deep reactive ion etching, tested with instrumented indentation, and test results interpreted using finite element analyses. Fracture strengths as great as 3 GPa were observed, with fracture initiating at processing-induced flaws and propagating along {1 1 1} and {1 1 0} planes.