| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10634110 | Scripta Materialia | 2012 | 4 Pages |
Abstract
The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Xiangming Li, Litong Zhang, Xiaowei Yin,