Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10637725 | Cryogenics | 2005 | 4 Pages |
Abstract
In an YBa2Cu3O7âδ/SrTiO3/YBa2Cu3O7âδ parallel capacitor fabricated by a chemical mechanical planarization method, the dielectric constant and loss in the presence of electric fields at 2.2 K were more than 26,000 and less than 0.027, respectively. We propose a multilayer model that explains this behavior. The model assumes that the SrTiO3 film is composed of single-crystal-like SrTiO3 layers with a dielectric constant εr = 30,000 and degraded SrTiO3 layers with dielectric constants that vary continuously from 25, the dielectric constant of YBa2Cu3O7âδ, to 30,000. Results of a numerical calculation revealed that the thickness of the single-crystal-like SrTiO3 layer was more than 92% of a 600-nm-thick SrTiO3 film.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Hiroshi Takashima, Ruiping Wang, Makoto Okano, Akira Shoji, Mitsuru Itoh,