Article ID Journal Published Year Pages File Type
10639885 Materials Science and Engineering: B 2013 6 Pages PDF
Abstract
► We investigate the properties of phosphorus and boron-doped silicon nitride films. ► Phosphorus-doped layers yield higher lifetimes than undoped ones. ► The fixed charges density decreases when increasing the films phosphorus content. ► Boron-doped films feature very low lifetimes. ► These doped layers are of particular interest for crystalline silicon solar cells.
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Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Preview
Investigation of charges carrier density in phosphorus and boron doped SiNx:H layers for crystalline silicon solar cells
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