Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10640180 | Materials Science and Engineering: B | 2005 | 5 Pages |
Abstract
The characteristics of a humidity sensor using a water-soluble and a single crystal material with composition (Li2MoO4)x(CaMoO4)1âx, where x is 0.8-0.9 have been studied in detail. The fabrication technology has been developed for a low humidity sensor. The specific procedures with the use of polystyrol and teflon combination as protective layer have been developed for technological sensors by microelectronics techniques. The logarithm of the sensor conductance logÂ Ï is linear decreasing function of ratio log2(Cs/C), where Cs is the concentration of saturated water vapours and C is the concentration of water vapours to be detected up to 8000 ppm.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Il Jin Kim, Sang Do Han, Hi Deok Lee, Jin Suk Wang, Ishwar Singh, S.V. Kornilov,