Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10641250 | Optics Communications | 2011 | 5 Pages |
Abstract
⺠Optical interferometer with 15 nm fringe spacing. ⺠Parallel multipass order up to 21. ⺠Ultimate resolution of displacement measurement of 8.7.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Jeongmin Lee, Hosang Yoon, Tai Hyun Yoon,