Growth of single-domain monatomic In chain arrays on the vicinal Si(0Â 0Â 1) surface

Using the annealed vicinal Si(0 0 1) surface with 4° miscut toward the [1 1 0] direction as a substrate, single-domain monatomic In chain arrays have been fabricated. High-resolution STM images reveal that deposited In atoms preferentially form In dimers between two neighboring Si dimer rows along the step edges on the lower terrace. Formation of In dimers removes the surface dangling bonds and saturates the In valency. With increasing coverage, the In dimers develop into straight monatomic In chains along the step running direction. It is found that the ordered narrow terrace and rebonded double-layer (DB) step edge are the keys for the formation of monatomic In chains.