Article ID Journal Published Year Pages File Type
10643718 Superlattices and Microstructures 2005 21 Pages PDF
Abstract
Due to the potential applications in optoelectronic areas, Si/SiO2 superlattices have been focused on extensively in the last few years. The work spans a wide range from theory to experiment, investigating mechanisms and structural, electronic and optical properties of the material, and also including deposition technologies and analytical methods; it has led to a much better understanding of the material and a series of fruitful results have been obtained. This paper centers on reviewing the progress and present status of Si/SiO2 superlattice research-for the first time, to our knowledge. The present work gives the authors' assessment of the area of Si/SiO2 superlattice deposition, including deposition technologies, characterization methods, film properties and potential applications. Finally, some existing problems and other related Si based structures with potential optoelectronic applications are summarized.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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