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Simulation study on the influence of distribution of temperature, gas flow rate and gas component on SiC nanowires grew in self-designed CVD reaction chamber

Article ID Journal Published Year Pages File Type
10644472 Computational Materials Science 2015 6 Pages PDF
Keywords
Gas flow rateTemperatureSimulationSiC nanowires
Related Topics
Physical Sciences and Engineering Engineering Computational Mechanics
Preview
Simulation study on the influence of distribution of temperature, gas flow rate and gas component on SiC nanowires grew in self-designed CVD reaction chamber
Authors
Zhenjiang Li, Xiaolong Liu, Meng Zhang, Meixin Zhai,
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Journal
Computational Materials Science
Journal: Computational Materials Science
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