Article ID Journal Published Year Pages File Type
10652218 Micron 2012 7 Pages PDF
Abstract
► Scattering electrons out of the primary beam impacts quantitative chemical analysis. ► Scattering cross sections measured with a dual Faraday cup device. ► Measurements are compared with cross sections calculated from theory. ► Agreement with other measurements; factor of 2 difference with theory.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Materials Science (General)
Preview
Electron scattering cross section measurements in a variable pressure scanning electron microscope
Authors
, ,