| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10652219 | Micron | 2012 | 4 Pages |
Abstract
⺠Formation of markers on a TEM specimen by using a helium ion microscope. ⺠Because of the position controllability, the markers could be placed efficiently. ⺠The method facilitates the identification of the markers in the alignment process.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Misa Hayashida, Tomohiko Iijima, Toshiyuki Fujimoto, Shinichi Ogawa,