| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10652224 | Micron | 2011 | 9 Pages |
Abstract
ⶠWe evaluate the reliability of the CFTM and GPA methods for strain analysis. ⶠThe leakage effect generates error when these methods are applied at ultra-thin layers. ⶠThe error limits the use of these methods at ultra-thin layers. ⶠIncreased image resolution for an original image will decrease the error. ⶠThe CFTM and GPA methods are well matched.
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Wonjae Chang, T.D. Brown,