Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10652230 | Micron | 2011 | 6 Pages |
Abstract
⺠Positive and negative space charges are distributed alternately. ⺠Leakage currents decrease to a stable value with increasing film thickness. ⺠Surface potential of thin films exhibits minimum negative value with variation of beam energy. ⺠Surface potential of thick films decreases with the increase in beam energy.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Wei-Qin Li, Kun Mu, Rong-Hou Xia,