| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10652257 | Micron | 2011 | 4 Pages |
Abstract
ⶠMethod for placing markers on a rod-shaped specimen fabricated by FIB technology in a vacuum vessel. ⶠMarkers can be placed only on the carbon layer with the help of a mask. ⶠThe method facilitates the identification of the markers in the alignment process.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Materials Science (General)
Authors
Misa Hayashida, Shinya Terauchi, Toshiyuki Fujimoto,