Dual codoping for the fabrication of low resistive p-ZnO

► Dual codoping has been proposed to fabricate low resistive and stable p-ZnO thin films. ► As-Al-N dual codoped ZnO films have been grown on GaAs substrate by RF magnetron sputtering using AlN doped ZnO targets. ► The dual codoped film showed strong p-conductivity with hole concentration of 4.72 × 1020 cm−3 and low resistivity of 8.6 × 10−2 Ω cm.