Article ID Journal Published Year Pages File Type
10666513 Materials Letters 2005 4 Pages PDF
Abstract
ZnGa2O4:Mn thin film phosphors were prepared on ITO/glass by rf magnetron reactive sputtering. The effects of the oxygen partial pressure in sputtering and annealing atmospheres on crystallinity, compositional variations, and luminescent properties of thin films were investigated. Atomic ratio of Ga/Zn in films strongly depended on the postannealing conditions, as well as the oxygen partial pressure in sputtering gas during sputtering, and accordingly affected the luminous properties.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
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