| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668085 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠The effect of target erosion on the deposition rate of alumina thin films is studied. ⺠Target erosion dramatically affects the hysteresis behavior of the system. ⺠Depositions were made within the hysteresis transition region using a feedback loop. ⺠The deposition rate depends on the cathode voltage relative to the hysteresis behavior. ⺠The deposition rate can be controlled by the relative voltage set-point.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
N.D. Madsen, B.H. Christensen, S. Louring, A.N. Berthelsen, K.P. Almtoft, L.P. Nielsen, J. Bøttiger,