Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10668117 | Surface and Coatings Technology | 2011 | 7 Pages |
Abstract
⺠Al-Cr-O-N thin films in corundum α-(Al1âx,Crx)2+δ(O1ây,Ny)3 solid solution structure. ⺠Magnetron sputtering from a segmented Al-Cr target in Ar-O2-N2 atmosphere. ⺠Combinatorial approach to thin film development. ⺠Systematic variation of Al:Cr concentration ratio and N2/(N2+O2) gas flow ratio.
Related Topics
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Authors
D. Diechle, M. Stueber, H. Leiste, S. Ulrich,