| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668133 | Surface and Coatings Technology | 2011 | 5 Pages |
Abstract
⺠Increased mass of sputtering gas gives more varied crystalline texture for silver. ⺠Heavy sputter gas improves electrical conductivity and reflectance of silver films. ⺠Lighter sputtering gases give harder and smoother silver coatings. ⺠Gas inclusion in the film is greater for lighter sputtering gases. ⺠Molybdenum films have increased grain size when sputtered with heavier gas species.
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Authors
G.T. West, P.J. Kelly,