| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668150 | Surface and Coatings Technology | 2011 | 6 Pages |
Abstract
âºThe Berg's model was successfully modified and applied to a triode magnetron sputtering system. âºThe results show that decreasing the grid-to-target distance reduces the hysteresis loop in reactive deposition of TiN. âºThe reduced hysteresis in TMS is due to the deposition of material on the grid, reducing the role of the collecting area.
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Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
J.C. Sagás, D.A. Duarte, D.R. Irala, L.C. Fontana, T.R. Rosa,