| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668190 | Surface and Coatings Technology | 2011 | 4 Pages |
Abstract
⺠Thin films of two different Si-B-C-N chemical compositions have been annealed at various temperatures. ⺠The samples have been characterized by TDTR, XRD, and SEM. ⺠Si30-32B10-12C2-4N49-51 thin films remain amorphous at 1400 °C with low thermal conductivity. ⺠Si39-41B9-11C2-4N43-45 thin films crystallize at 1400 °C with increased thermal conductivity.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Jamie J. Gengler, Jianjun Hu, John G. Jones, Andrey A. Voevodin, Petr Steidl, Jaroslav VlÄek,