| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668204 | Surface and Coatings Technology | 2011 | 8 Pages |
Abstract
⺠We successfully synthesized CFx (0.16 â¤Â x â¤Â 0.35) thin solid films by using HiPIMS. ⺠All as-deposited CFx films were found to exhibit an amorphous microstructure. ⺠CFx films with x â¤Â 0.23 showed a graphitic nature. ⺠A polymeric structure for CFx films with x ?â¥Â 0.26 was found. ⺠DFT calculations showed plasma species and defects relevant for the film formation.
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Authors
S. Schmidt, G. Greczynski, C. Goyenola, G.K. Gueorguiev, Zs. Czigány, J. Jensen, I.G. Ivanov, L. Hultman,