| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668340 | Surface and Coatings Technology | 2012 | 5 Pages |
Abstract
⺠Amorphous carbon films are grown employing HIPIMS as well as dcMS, for reference. ⺠HiPIMS provides larger fluxes of Ar+ ions the growing film compared to dcMS. ⺠HiPIMS films are denser with larger fraction of sp3 bonds compared to dcMS.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
K. Sarakinos, A. Braun, C. Zilkens, S. Mráz, J.M. Schneider, H. Zoubos, P. Patsalas,