| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668410 | Surface and Coatings Technology | 2011 | 6 Pages |
Abstract
âºEffect of different target types on sputter deposition of Ti1 â XAlXN coatings. âºDeposition time reduced to 2/3 for compound compared to mosaic targets. âºCoatings grown from compound targets: reduced friction and higher wear resistance. âºDifferences explained by the individual sputter behavior of the targets.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
N. Schalk, T. Weirather, C. Polzer, P. Polcik, C. Mitterer,