| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668446 | Surface and Coatings Technology | 2011 | 9 Pages |
Abstract
⺠Overview with review and tutorial character. ⺠High power impulse magnetron sputtering is defined and distinguished from other forms of sputtering. ⺠Roles of self-sputtering and rarefaction are emphasized. ⺠Self-sputtering may (or may not) run away. ⺠HIPIMS physics is illustrated using niobium target. ⺠HIPIMS offers new opportunities for selected coatings applications.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
André Anders,