Characterization of reactively sputtered permeation barrier materials on polymer substrates

Cross-section images taken with SEM show a very compact structure for both aluminum oxide and zinc-tin oxide layers. These materials also have the lowest water vapor permeation compared to all other materials. Zinc oxide and titanium oxide layers both exhibit a columnar structure. Zinc oxide is polycrystalline and has a surprising low water vapor and oxygen permeation. In contrast to that the amorphous titanium oxide layers show a high water vapor and oxygen permeation which is not decreasing with an increasing layer thickness above 40 nm.