Article ID Journal Published Year Pages File Type
10668522 Surface and Coatings Technology 2011 5 Pages PDF
Abstract
► Two step plasma excitation leads to two stable discharge states and a transition. ► Plasma densities in the high 1017 m-3 region obtained during the transition. ► Beam-like electrons found during pulse initiation. ► Negative plasma potentials explained by volume-averaged model of quasineutrality.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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