Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10668522 | Surface and Coatings Technology | 2011 | 5 Pages |
Abstract
⺠Two step plasma excitation leads to two stable discharge states and a transition. ⺠Plasma densities in the high 1017 m-3 region obtained during the transition. ⺠Beam-like electrons found during pulse initiation. ⺠Negative plasma potentials explained by volume-averaged model of quasineutrality.
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Authors
B. Liebig, N. St J. Braithwaite, P.J. Kelly, R. Chistyakov, B. Abraham, J.W. Bradley,