| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668534 | Surface and Coatings Technology | 2011 | 5 Pages |
Abstract
⺠We developed an atmospheric microwave plasma torch assisted by FEM simulations. ⺠We determined the gas temperature of the plasma by optical emission spectroscopy. ⺠Silicon powder was reactively evaporated in an Ar/H2-Plasma. ⺠Thin silicon coatings were deposited and investigated.
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Authors
J. Kopecki, D. Kiesler, M. Leins, A. Schulz, M. Walker, M. Kaiser, H. Muegge, U. Stroth,