Article ID Journal Published Year Pages File Type
10668537 Surface and Coatings Technology 2011 4 Pages PDF
Abstract
An established dwell time method allowed precise local deposition of films and analogous structures which were transferred into the substrate bulk material using ion beam techniques or mechanical polishing. Shape-preserving transfers have been successfully conducted.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Surface figuring of glass substrates by local deposition of silicon oxide with atmospheric pressure plasma jet
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