| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668549 | Surface and Coatings Technology | 2011 | 4 Pages |
Abstract
This paper deals with the characterization of an atomic hydrogen source created in a radio-frequency reactor with a helicon configuration. To achieve this purpose, optical (laser induced fluorescence) and electrical (Langmuir probe) diagnostics are used to monitor the behavior of the species composing the plasma. The influence of pressure, gas composition, and impact of the magnetic fields (in the source and diffusion chambers) are investigated.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
T. Bieber, L. de Poucques, J.-L. Vasseur, R. Hugon, M. Belmahi, J. Bougdira,