Article ID Journal Published Year Pages File Type
10668556 Surface and Coatings Technology 2011 5 Pages PDF
Abstract
►TiB2 films deposited by dc-magnetron sputtering. ►XRD measurements indicate a strong TiB2 preferential (001) orientation. ►Compressive stress increases upon the increase of the film density. ►Correlation between stress, hardness and elastic modulus with film density.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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