Article ID Journal Published Year Pages File Type
10668561 Surface and Coatings Technology 2011 6 Pages PDF
Abstract
► Nano- and microstructuring of glasses by self-masking during reactive ion etching. ► Realization of different roughness morphologies leading to dosed optical scattering. ► Reproducible structuring of different types of glass. ► Up-scaling to 9cm diameter sample shown, likely possible for much larger substrates.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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