Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10668561 | Surface and Coatings Technology | 2011 | 6 Pages |
Abstract
⺠Nano- and microstructuring of glasses by self-masking during reactive ion etching. ⺠Realization of different roughness morphologies leading to dosed optical scattering. ⺠Reproducible structuring of different types of glass. ⺠Up-scaling to 9cm diameter sample shown, likely possible for much larger substrates.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Eric Hein, Dennis Fox, Henning Fouckhardt,