Plasma polymer multilayers of organosilicones and their optical properties controlled by RF power

Hydrogenated amorphous carbon-silicon alloys were prepared from tetravinylsilane monomer using plasma-enhanced chemical vapor deposition at different powers (10-70 W). The optical properties of the plasma polymer films were analyzed by spectroscopic ellipsometry in the range 250-830 nm. The refractive index of pp-TVS films can be controlled by RF power, which for a wavelength of 633 nm ranged from 1.69 (10 W) to 2.08 (70 W). Alloys of selected optical properties were used to construct layered films with sharp interfaces. We could confirm that individual layers retain their optical properties in layered structures if the layer thickness is between 1 μm and 25 nm. Nanolayered and gradual films of controlled optical properties can be developed for nanolayered composites and optical devices.