| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668711 | Surface and Coatings Technology | 2010 | 6 Pages |
Abstract
âºReactive dcMS of SnOx:Sb without any additional heating of the substrate. âºNarrow process window for the oxygen content for transparent conducting films. âºAt low oxygen content, yellow brownish SnO occurs leading to scattering by defects. âºAt high O2 content, optical properties improve-electrical properties deteriorate. âºThe above is attributed to oxygen ion bombardment causing defect formation.
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Nanotechnology
Authors
J. Boltz, D. Koehl, M. Wuttig,