| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10668751 | Surface and Coatings Technology | 2005 | 5 Pages |
Abstract
Crystallization behavior of sol-gel-based TiO2 precursor films by vacuum ultraviolet (VUV) light illumination was investigated. VUV light illumination induces densification of films. This reaction accompanies the removal of organic compounds and OH groups with increasing apparent coordination number of titanium in the film from five to six. This structure change enhances film crystallization; polycrystalline anatase films were obtained by post annealing at 300 °C. Crystallization behavior suggested that proper balance of densification and removal of organic compounds are important tasks for further lowering crystallization temperature.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Akira Nakajima, Nobuaki Hayashi, Yayoi Taniguchi, Yoshikazu Kameshima, Kiyoshi Okada,