• Daneshyari
  • Topics
    • Physical Sciences and Engineering
      Life Sciences
      Health Sciences
      Social Sciences and Humanities
Physical Sciences and Engineering Materials Science Nanotechnology

In and out of incidence plane Mueller matrix scattering ellipsometry of rough mc-Si

Article ID Journal Published Year Pages File Type
10669654 Thin Solid Films 2014 6 Pages PDF
Abstract
For the as-cut surface with an estimated correlation length of 4 μm and root mean square roughness of 550 nm, using an illumination wavelength of 532 nm, the degree of polarization is observed to be larger than 0.86, even far away from the incidence plane.
Keywords
ScatterometryRough surfaceMueller matrix
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
In and out of incidence plane Mueller matrix scattering ellipsometry of rough mc-Si
Authors
Jérôme Maria, Lars Martin Sandvik Aas, Morten Kildemo,
Related Articles
Influence of doping concentration on the dominant injection and transport mechanisms of electrons within Alq3 doped NPB films
The thermal stability of silver-based high reflectance coatings
High performance top-gated indium–zinc–oxide thin film transistors with in-situ formed HfO2 gate insulator
Random telegraph noise: The key to single defect studies in nano-devices
Study of the light emission in Ge layers and strained membranes on Si substrates
Dry photolithography through ultraviolet radiation-induced photo-etching of polymethyl methacrylate
Submicron-scale diamond selective-area growth by hot-filament chemical vapor deposition
One-step synthesis of crystalline Mn2O3 thin film by ultrasonic spray pyrolysis
Self-forming barrier layer from CuMnTi alloy layer on SiO2 substrate
Effect of Na on sulfurization growth of SnS thin films and solar cells using NaF/Sn-S precursor
Journal
Thin Solid Films
Journal: Thin Solid Films
Related Categories
Scatterometry
Rough surface
Mueller matrix
Biomaterials
Ceramics and Composites
Electronic, Optical and Magnetic Materials
Materials Chemistry
Materials Science (General)
Metals and Alloys
Nanotechnology
Polymers and Plastics
Surfaces, Coatings and Films
Related Journals
Biomaterials
Nano Today
Microporous and Mesoporous Materials
Archives of Civil and Mechanical Engineering
Nano Communication Networks
Advances in Colloid and Interface Science
Colloid and Interface Science Communications
Colloids and Surfaces A: Physicochemical and Engineering Aspects
Colloids and Surfaces B: Biointerfaces
Current Opinion in Colloid & Interface Science
Journal of Colloid and Interface Science
Diamond and Related Materials
Extreme Mechanics Letters
Precision Engineering
Materials Today
Composites Science and Technology
Nanomedicine: Nanotechnology, Biology and Medicine
International Journal of Hydrogen Energy
Journal of Power Sources
Nano-Structures & Nano-Objects
Polymer
Polymer Degradation and Stability
Progress in Polymer Science
Applied Surface Science
Chemical Physics
Chemical Physics Letters
Surface Science
Carbon
Daneshyari provides fulltext access to millions of research papers.