| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10669781 | Thin Solid Films | 2012 | 8 Pages |
Abstract
⺠Deposited highly c-axis oriented AlN films on polyimide substrates. ⺠Investigated the effects of deposition parameters on the structural of AlN films. ⺠Low pressure, optimized N2/Ar flow ratio and power benefit AlN (002) orientation. ⺠Al underlayer has a strong influence on the film crystallography.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
H. Jin, J. Zhou, S.R. Dong, B. Feng, J.K. Luo, D.M. Wang, W.I. Milne, C.Y. Yang,