Article ID Journal Published Year Pages File Type
10669783 Thin Solid Films 2012 5 Pages PDF
Abstract
► Nanostructured silicon carbon films show visible photoluminescence at room temperature. ► Optical bandgap, C and H contents are dependent on plasma radiofrequency (rf) power. ► The film structure evolves from micro to nanocrystalline phase with increasing rf power. ► rf power is an effective tool to control the size of Si nanocrystallites.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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