Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10669783 | Thin Solid Films | 2012 | 5 Pages |
Abstract
⺠Nanostructured silicon carbon films show visible photoluminescence at room temperature. ⺠Optical bandgap, C and H contents are dependent on plasma radiofrequency (rf) power. ⺠The film structure evolves from micro to nanocrystalline phase with increasing rf power. ⺠rf power is an effective tool to control the size of Si nanocrystallites.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
G. Ambrosone, D.K. Basa, U. Coscia, M. Passacantando,