Article ID Journal Published Year Pages File Type
10669785 Thin Solid Films 2012 5 Pages PDF
Abstract
► We describe the deposition of ultrathin layers of parylene C (down to 18 nm). ► We describe a simple method to test the layers for closeness. ► Using this technique we show that parylene C layers thicker than 30 nm are closed.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Preview
Deposition of ultrathin parylene C films in the range of 18 nm to 142 nm: Controlling the layer thickness and assessing the closeness of the deposited films
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