Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10669787 | Thin Solid Films | 2012 | 4 Pages |
Abstract
⺠Indium implanted SiO2 thin film formed by ion beam injection catalyzes a reaction. ⺠Dependence of catalytic properties on incident energy and dose is investigated. ⺠There is an optimal ion energy and ion dose in the film preparation process.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
S. Yoshimura, M. Kiuchi, Y. Nishimoto, M. Yasuda, A. Baba, S. Hamaguchi,