Article ID Journal Published Year Pages File Type
10669816 Thin Solid Films 2012 4 Pages PDF
Abstract
► Impact of encapsulating dielectric properties on post-packaging device failure rate. ► Encapsulating dielectric layer characteristics influence device failure rate. ► Device failure rate increases with the effective Young's modulus of encapsulating dielectric. ► Increase in SiOH concentration in dielectrics results in a decrease in SiOx Young's modulus. ► Device failure rate reduces with increase in SiOH concentration in the SiOx.
Related Topics
Physical Sciences and Engineering Materials Science Nanotechnology
Authors
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